Snyders, R https://orcid.org/0000-0001-8164-346X
Hegemann, D https://orcid.org/0000-0003-4226-9326
Thiry, D
Zabeida, O https://orcid.org/0000-0001-8103-9852
Klemberg-Sapieha, J https://orcid.org/0000-0001-6051-1978
Martinu, L https://orcid.org/0000-0003-2630-4048
Article Title: Foundations of plasma enhanced chemical vapor deposition of functional coatings
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-11-25
Date Accepted: 2023-06-01
Online publication date: 2023-07-06