Vanraes, Patrick https://orcid.org/0000-0003-2792-7896
Parayil Venugopalan, Syam
Besemer, Matthieu
Bogaerts, Annemie https://orcid.org/0000-0001-9875-6460
Funding for this research was provided by:
ASML
ASML
Article Title: Assessing neutral transport mechanisms in aspect ratio dependent etching by means of experiments and multiscale plasma modeling
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2022-12-27
Date Accepted: 2023-06-07
Online publication date: 2023-07-03