Noesges, K https://orcid.org/0000-0002-1579-3301
Klich, M https://orcid.org/0000-0002-3913-1783
Derzsi, A https://orcid.org/0000-0002-8005-5348
Horváth, B https://orcid.org/0000-0002-2371-2444
Schulze, J https://orcid.org/0000-0001-7929-5734
Brinkmann, R P https://orcid.org/0000-0002-2581-9894
Mussenbrock, T https://orcid.org/0000-0001-6445-4990
Wilczek, S https://orcid.org/0000-0003-0583-4613
Funding for this research was provided by:
Deutsche Forschungsgemeinschaft (428942393)
Article Title: Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-03-27
Date Accepted: 2023-07-18
Online publication date: 2023-08-14