Meyer, T https://orcid.org/0000-0002-4060-5835
Girard, A
Bouška, M
Baudet, E
Baillieul, M
Nĕmec, P
Nazabal, V
Cardinaud, C https://orcid.org/0000-0002-9753-8848
Funding for this research was provided by:
Barrande
Czech Science Foundation
Article Title: Mass spectrometry and in situ x-ray photoelectron spectroscopy investigations of organometallic species induced by the etching of germanium, antimony and selenium in a methane-based plasma
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-03-30
Date Accepted: 2023-07-25
Online publication date: 2023-08-08