Luo, Han https://orcid.org/0000-0001-5013-147X
Kenney, Jason https://orcid.org/0000-0001-8813-1213
Rauf, Shahid https://orcid.org/0000-0001-5689-6115
Korolov, Ihor https://orcid.org/0000-0003-2384-1243
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Article Title: Numerical and experimental study of ion energy distribution function in a dual-frequency capacitively coupled oxygen discharge
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-07-06
Date Accepted: 2023-11-16
Online publication date: 2023-11-28