Fischer, J https://orcid.org/0000-0001-9116-6302
Renner, M https://orcid.org/0000-0002-5412-4936
Gudmundsson, J T https://orcid.org/0000-0002-8153-3209
Rudolph, M https://orcid.org/0000-0002-0854-6708
Hajihoseini, H https://orcid.org/0000-0002-2494-6584
Brenning, N https://orcid.org/0000-0003-1308-9270
Lundin, D https://orcid.org/0000-0001-8591-1003
Funding for this research was provided by:
Icelandic Research Fund (196141)
Vetenskapsrådet (VR 2018-04139)
Evatec AG
Swedish Government Strategic Research Area in Materials Science on Functional Materials at Linköping University (2009-00971)
Article Title: Insights into the copper HiPIMS discharge: deposition rate and ionised flux fraction
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2023-09-20
Date Accepted: 2023-11-29
Online publication date: 2023-12-18