Shi, De-Hua
Wang, Xiao-Kun https://orcid.org/0000-0003-4160-5316
Liu, Yong-Xin https://orcid.org/0000-0002-6506-7148
Donkó, Zoltán https://orcid.org/0000-0003-1369-6150
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Wang, You-Nian
Funding for this research was provided by:
Fundamental Research Funds for the Central Universities (DUT21TD104)
NRDI Office of Hungary via the grant (OTKA-K134462)
China Scholarship Council (202106060085)
National Natural Science Foundation of China (11935005)
Article Title: An experimental and computational study on the ignition process of a pulse modulated dual-RF capacitively coupled plasma operated at various low-frequency voltage amplitudes
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-07-07
Date Accepted: 2024-02-01
Online publication date: 2024-02-13