Dong, Wan https://orcid.org/0000-0003-1164-6707
Zhang, Yi-Fan https://orcid.org/0000-0001-7540-0891
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Song, Yuan-Hong https://orcid.org/0000-0001-5712-9241
Funding for this research was provided by:
National Natural Science Foundation of China (11975067)
Article Title: Hybrid simulation of instabilities in capacitively coupled RF CF4/Ar plasmas driven by a dual frequency source
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2023-11-12
Date Accepted: 2024-02-07
Online publication date: 2024-02-22