Verma, Abhishek https://orcid.org/0000-0002-0870-9984
Rauf, Shahid https://orcid.org/0000-0001-5689-6115
Bera, Kallol https://orcid.org/0000-0002-9948-8098
Sydorenko, D
Khrabrov, A
Kaganovich, Igor https://orcid.org/0000-0003-0653-5682
Article Title: Study of synchronous RF pulsing in dual frequency capacitively coupled plasma
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2023-07-24
Date Accepted: 2024-02-15
Online publication date: 2024-03-11