Wang, Yu https://orcid.org/0000-0003-3519-3677
Zhou, Youyou https://orcid.org/0000-0002-5384-4739
Chen, Jian https://orcid.org/0000-0003-1723-5829
Cao, Yong https://orcid.org/0000-0003-3619-4380
Wang, Zhijiang https://orcid.org/0000-0001-5276-1520
Huang, Xiaojiang https://orcid.org/0000-0003-0320-4773
Zhang, Ya https://orcid.org/0000-0003-0473-467X
Funding for this research was provided by:
National Natural Science Foundation of China (11975174)
Shenzhen Technology Project (No. GJHZ20220913143010019)
National Magnetic Confinement Fusion Energy Research Project (2017YFE0301805)
Basic and Applied Basic Research Foundation of Guangdong Province (No. 2023A1515010137)
Article Title: Numerical characterization of capacitively coupled plasma driven by tailored frequency modulated radio frequency source
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-12-26
Date Accepted: 2024-04-30
Online publication date: 2024-05-13