Ma, Xiaochi https://orcid.org/0000-0003-0951-9338
Bai, Luying
Zhu, Yifei https://orcid.org/0000-0001-8989-0051
Jiang, Xinxian
Funding for this research was provided by:
National Natural Science Foundation of China (52025064)
National Key Research and Development Program of China (2022YFC2604002)
Article Title: Numerical investigation of discharge evolution and breakdown characteristics of ArF excimer lasers
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-01-19
Date Accepted: 2024-07-02
Online publication date: 2024-07-22