Wang, Xiao-Kun https://orcid.org/0000-0003-4160-5316
Masheyeva, Ranna https://orcid.org/0000-0002-6950-662X
Liu, Yong-Xin https://orcid.org/0000-0002-6506-7148
Song, Yuan-Hong https://orcid.org/0000-0001-5712-9241
Hartmann, Peter https://orcid.org/0000-0003-3572-1310
Donkó, Zoltán https://orcid.org/0000-0003-1369-6150
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Funding for this research was provided by:
National Natural Science Foundation of China (12275043)
Hungarian National Office for Research, Development, and Innovation (K134462)
Fundamental Research Funds for the Central Universities (DUT21TD104)
China Scholarship Council (202106060085)
Deutsche Forschungsgemeinschaft (138690629)
Article Title: Energy efficient F atom generation and control in CF4 capacitively coupled plasmas driven by tailored voltage waveforms
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2024 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2024-03-12
Date Accepted: 2024-07-31
Online publication date: 2024-08-14