Wen, Hui https://orcid.org/0009-0006-2420-5512
Schulze, Julian https://orcid.org/0000-0001-7929-5734
Zhang, Quan-Zhi https://orcid.org/0000-0002-5726-0829
Funding for this research was provided by:
Basic and Applied Basic Research Foundation of Guangdong Province (No. 2021B1515120018)
National Natural Science Foundation of China (Nos. 12105035)
Fundamental Research Funds for the Central Universities (No. DUT21TD104)
Deutsche Forschungsgemeinschaft (No. 138690629)
Article Title: Heating mode transitions in capacitively coupled CF4 plasmas at low pressure
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-01-07
Date Accepted: 2024-08-05
Online publication date: 2024-08-14