Kouadou, E https://orcid.org/0009-0008-8208-1364
Iseni, S https://orcid.org/0000-0002-4923-1657
Stolz, A https://orcid.org/0000-0001-5952-5918
Lefaucheux, P
Dussart, R https://orcid.org/0000-0003-2001-5034
Funding for this research was provided by:
Agence Nationale de la Recherche (ANR-20-CE09-000)
Article Title: Discharge characteristics of silicon-based DC Helium microplasmas: comparison between Through Silicon Via and closed cavity type micro-reactors
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-06-24
Date Accepted: 2024-10-23
Online publication date: 2024-11-05