Yeom, Hee-Jung https://orcid.org/0000-0002-8101-6041
Chae, Gwang-Seok https://orcid.org/0000-0003-1364-6671
Kim, Jung-Hyung https://orcid.org/0000-0002-7197-6073
Lee, Hyo-Chang https://orcid.org/0000-0003-2754-1512
Funding for this research was provided by:
Korea Research Institute of Standards and Science (GP2024-0012-04)
Korea Evaluation Institute of Industrial Technology (1415181740)
Ministry of Trade, Industry and Energy (1415187709)
Korea Semiconductor Research Consortium (00235950)
National Research Council of Science and Technology (CRC20014-000)
National Research Foundation of Korea (2020M3H4A3106004)
Article Title: Analysis of uncertainty in measurement of electron temperature in low-pressure inductively coupled plasmas using microwave cutoff probe
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-04-04
Date Accepted: 2024-11-08
Online publication date: 2024-11-19