Son, Jin-Ung
Lee, Moo-Hyun
Kim, Min-Seok
Jung, Jiwon
Seo, Beom-Jun
Kim, Ju-Ho https://orcid.org/0000-0001-9012-8275
Chung, Chin-Wook https://orcid.org/0000-0002-7771-6547
Funding for this research was provided by:
Ministry of Trade, Industry and Energy (00154752)
Article Title: A method for measuring individual ion density in an Ar/He mixture inductively coupled plasma
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-10-21
Date Accepted: 2025-02-07
Online publication date: 2025-03-10