Jiang, Yi-Lang https://orcid.org/0000-0002-6611-4743
He, You
Seo, Beom-Jun
Lee, Myoung-Jae
Kim, Ju-Ho https://orcid.org/0000-0001-9012-8275
Chung, Chin-Wook https://orcid.org/0000-0002-7771-6547
Funding for this research was provided by:
Ministry of Trade, Industry & Energy (1415187403)
National Research Foundation of Korea (No. RS-2023-00260527)
Korea Semiconductor Research Consortium (RS-2023-00235950)
Article Title: Control of axial direction electron temperature distribution by gradient DC magnetic field in inductively coupled plasma
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2024-04-17
Date Accepted: 2025-02-26
Online publication date: 2025-03-14