Eremin, D https://orcid.org/0000-0001-5160-6385
Sharova, Yu https://orcid.org/0000-0003-2125-3085
Heijmans, L
Yakunin, A M
van de Kerkhof, M
Brinkmann, R P
Kemaneci, E https://orcid.org/0000-0002-5540-0947
Funding for this research was provided by:
ASML Netherlands BV (ECR PIC Computational Plasma Investigation)
Article Title: Electromagnetic particle-in-cell modeling of an electron cyclotron resonance plasma discharge in hydrogen
Journal Title: Plasma Sources Science and Technology
Article Type: paper
Copyright Information: © 2025 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2024-12-31
Date Accepted: 2025-05-16
Online publication date: 2025-06-04