Li, Jie https://orcid.org/0009-0005-0093-537X
Kundu, Shreya
Souriau, Laurent
Belmonte, Attilio
Devriendt, Katia
Article Title: Atomic layer etching of InGaZnO thin films via plasma hydrocarbonation and oxygen radical reaction
Journal Title: Plasma Sources Science and Technology
Article Type: paper
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Publication dates
Date Received: 2025-03-19
Date Accepted: 2025-07-31
Online publication date: 2025-08-07