Hsieh, Dong-Ru
Kuo, Po-Yi
Lin, Jer-Yi
Chen, Yi-Hsuan
Chang, Tien-Shun
Chao, Tien-Sheng
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 103-2221-E-009-182-MY3)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: High-performance sidewall damascened tri-gate poly-si TFTs with the strain proximity free technique and stress memorization technique
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-08-18
Date accepted: 2016-11-07
Online publication date: 2017-01-09