Biyikli, Necmi
Haider, Ali
Funding for this research was provided by:
TUBITAK (112M482)
TUBITAK (112M004)
TUBITAK (112M578)
TUBITAK (214M015)
Journal title: Semiconductor Science and Technology
Article type: rev
Article title: Atomic layer deposition: an enabling technology for the growth of functional nanoscale semiconductors
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2016-01-07
Date accepted: 2017-06-21
Online publication date: 2017-08-14