Kot, Dawid
Kissinger, Gudrun
Sattler, Andreas
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Sensitivity enhanced FTIR investigation of defects introduced by RTA pre-treatment in Czochralski silicon wafers
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-06-27
Date accepted: 2017-08-15
Online publication date: 2017-09-04