Prucnal, S
Frigerio, J https://orcid.org/0000-0003-2117-2744
Napolitani, E
Ballabio, A
Berencén, Y
Rebohle, L
Wang, M
Böttger, R
Voelskow, M https://orcid.org/0000-0002-2994-385X
Isella, G
Hübner, R
Helm, M
Zhou, S
Skorupa, W
Funding for this research was provided by:
European Union’s Seventh Framework Programme (613055)
German Federal Ministry of Education of Research (BMBF), (03SF0451)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: In situ ohmic contact formation for n-type Ge via non-equilibrium processing
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-07-18
Date accepted: 2017-09-08
Online publication date: 2017-10-04