Pavlidis, S https://orcid.org/0000-0002-1690-2581
Bayraktaroglu, B
Leedy, K
Henderson, W
Funding for this research was provided by:
Oak Ridge Institute for Science and Education
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: ALD TiOxas a top-gate dielectric and passivation layer for InGaZnO115ISFETs
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-07-30
Date accepted: 2017-09-08
Online publication date: 2017-10-04