Wang, Bing https://orcid.org/0000-0003-4335-3992
Bao, Shuyu
Made, Riko I
Lee, Kwang Hong
Wang, Cong
Lee, Kenneth Eng Kian
Fitzgerald, Eugene A
Michel, Jurgen
Funding for this research was provided by:
National Research Foundation Singapore
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Control wafer bow of InGaP on 200 mm Si by strain engineering
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-07-18
Date accepted: 2017-10-23
Online publication date: 2017-11-08