Funding for this research was provided by:
Masdar Institute of Science and Technology
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Passivation of Ge/high-κinterface using RF Plasma nitridation
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-08-30
Date accepted: 2017-11-07
Online publication date: 2017-11-30