Kim, Munho https://orcid.org/0000-0002-0379-1886
Cho, Sang June https://orcid.org/0000-0002-7784-2498
Dave, Yash Jayeshbhai
Mi, Hongyi
Mikael, Solomon
Seo, Jung-Hun https://orcid.org/0000-0002-5039-2503
Yoon, Jung U
Ma, Zhenqiang
Funding for this research was provided by:
Office of Naval Research (N00014-13-1-0226)
Air Force Office of Scientific Research (STTR program)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Fabrication of Ge-on-insulator wafers by Smart-CutTMwith thermal management for undamaged donor Ge wafers
Copyright information: © 2017 IOP Publishing Ltd
Publication dates
Date received: 2017-07-31
Date accepted: 2017-11-20
Online publication date: 2017-12-13