Kohen, David https://orcid.org/0000-0002-2593-3355
D’Costa, Vijay
Bhargava, Nupur https://orcid.org/0000-0002-0373-8962
Tolle, John
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Abrupt SiGe-to-Si interface: influence of chemical vapor deposition processes and characterization by different metrology techniques
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-06-05
Date accepted: 2018-08-20
Online publication date: 2018-09-05