Zhang, Xizhen https://orcid.org/0000-0003-1495-9290
Zhang, Sujuan
Pan, Xiuyu
Zhu, Huichao
Cheng, Chuanhui
Cheng, Yi
Yu, Tao
Xing, Guichao
Zhang, Daming
Bai, Mindi
Luo, Xixian
Chen, Baojiu https://orcid.org/0000-0003-1323-4474
Funding for this research was provided by:
International Science & Technology Cooperation Program of China (2015DFR10970)
National Natural Science Foundation of China (11774042, 61671100)
Doctor Initiated Project of Liaoning Province (20170520082)
Fundamental Research Funds for Central University (3132018241, 3132016333, DUT17LK03)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Error analysis and frequency selection guidelines for three-frequency correction in MOS capacitors
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-06-16
Date accepted: 2018-09-14
Online publication date: 2018-10-10