Loo, Roger https://orcid.org/0000-0003-3513-6058
Shimura, Yosuke https://orcid.org/0000-0002-1944-9970
Ike, Shinichi
Vohra, Anurag
Stoica, Toma
Stange, Daniela
Buca, Dan
Kohen, David
Margetis, Joe
Tolle, John
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Epitaxial GeSn: impact of process conditions on material quality
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-06-17
Date accepted: 2018-09-20
Online publication date: 2018-10-16