Maeda, Tatsuro https://orcid.org/0000-0001-9092-6226
Chang, Wen Hsin
Irisawa, Toshifumi
Ishii, Hiroyuki
Oka, Hiroshi
Kurosawa, Masashi
Imai, Yukihiro
Nakatsuka, Osamu
Uchida, Noriyuki
Funding for this research was provided by:
Japan Society for the Promotion of Science (17H06148)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Ultra-thin germanium-tin on insulator structure through direct bonding technique
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-06-29
Date accepted: 2018-10-04
Online publication date: 2018-10-24