Song, Peng https://orcid.org/0000-0002-6029-945X
Melnikov, Alexander
Sun, Qiming https://orcid.org/0000-0003-1184-3719
Mandelis, Andreas
Liu, Junyan
Funding for this research was provided by:
Canada Research Chairs Program
Natural Sciences and Engineering Research Council of Canada
Chinese Recruitment Program of Global Experts (Thousand Talents)
National Natural Science Foundation of China (61571153)
Journal title: Semiconductor Science and Technology
Article type: lett
Article title: Contactless non-destructive imaging of doping density and electrical resistivity of semiconductor Si wafers using lock-in carrierography
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-05-28
Date accepted: 2018-10-12
Online publication date: 2018-10-24