Shigesawa, Eriko https://orcid.org/0000-0003-0980-6169
Matsuoka, Ryotaro
Fukumoto, Masashi
Sano, Ryosuke https://orcid.org/0000-0003-0451-7958
Itoh, Kohei M
Nohira, Hiroshi
Sawano, Kentarou
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Study on Al2O3/Ge interface formed by ALD directly on epitaxial Ge
Copyright information: © 2018 IOP Publishing Ltd
Publication dates
Date received: 2018-07-31
Date accepted: 2018-10-29
Online publication date: 2018-11-20