Bärwolf, F
Fursenko, O
Zaumseil, P
Yamamoto, Y
Article Title: Dynamic SIMS, spectroscopic ellipsometry and x-ray diffractometry analysis of SiGe HBTs with Ge grading
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2018 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-06-30
Date Accepted: 2018-11-26
Online publication date: 2018-12-14