Barraud, S https://orcid.org/0000-0002-4334-9638
Previtali, B
Lapras, V
Coquand, R
Vizioz, C
Hartmann, J-M https://orcid.org/0000-0001-7006-8586
Cassé, M
Article Title: Top-down fabrication and electrical characterization of Si and SiGe nanowires for advanced CMOS technologies
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2018-10-31
Date Accepted: 2019-05-01
Online publication date: 2019-06-12