Lin, Zude
Zhan, Guanghui
Li, Xiuyan
You, Minmin
Zeng, Yujing
Wang, Fangfang https://orcid.org/0000-0002-9943-2289
Liu, Jingquan https://orcid.org/0000-0003-4140-1516
Funding for this research was provided by:
Program of Shanghai Academic/Technology Research Leader (18XD1401900)
Research Program of Shanghai Science and Technology Committee (17JC1402800)
National Natural Science Foundation of China (61728402)
National Key R&D Program of China (2017YFB1002501)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: The conduction process of grain and grain boundary in the semiconductive zirconium oxynitride thin film
Copyright information: © 2019 IOP Publishing Ltd
Publication dates
Date received: 2019-04-14
Date accepted: 2019-06-24
Online publication date: 2019-07-16