Ma, Pengfei https://orcid.org/0000-0003-1257-8021
Guo, Wenhao
Sun, Jiamin
Gao, Jiacheng
Zhang, Guanqun
Xin, Qian https://orcid.org/0000-0003-4605-5894
Li, Yuxiang https://orcid.org/0000-0002-9457-769X
Song, Aimin https://orcid.org/0000-0001-6550-518X
Funding for this research was provided by:
National Natural Science Foundation of China (11304180)
Engineering and Physical Sciences Research Council (EP/N021258/1)
China Postdoctoral Science Foundation (2015M582073)
Natural Science Foundation of Shandong Province (ZR2013EMQ011)
Natural Science Foundation of Jiangsu Province (BK20151255)
Suzhou Planning Projects of Science and Technology (SYG201527)
Fundamental Research Funds of Shandong University (2013TB008)
National Key Research and Development Program of China (2016YFA0201800)
Article Title: Electron transport mechanism through ultrathin Al 2 O 3 films grown at low temperatures using atomic–layer deposition
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2019 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2019-04-11
Date Accepted: 2019-07-11
Online publication date: 2019-09-09