Prabhakara, V https://orcid.org/0000-0003-4351-4557
Jannis, D
Béché, A
Bender, H https://orcid.org/0000-0003-0209-2597
Verbeeck, J
Article Title: Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2019-07-29
Date Accepted: 2019-11-29
Online publication date: 2020-02-11