Prabhakara, V http://orcid.org/0000-0003-4351-4557
Jannis, D
Béché, A
Bender, H http://orcid.org/0000-0003-0209-2597
Verbeeck, J
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Strain measurement in semiconductor FinFET devices using a novel moiré demodulation technique
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2019-07-29
Date accepted: 2019-11-29
Online publication date: 2020-02-11