Funding for this research was provided by:
MSIT(Ministry of Science and ICT), Korea (IITP-2019-2017-0-01015)
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Conformal doping strategy for fin structures: tailoring of dopant profile through multiple monolayer doping and capping layer control
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-01-21
Date accepted: 2020-03-03
Online publication date: 2020-04-03