Funding for this research was provided by:
MSIT(Ministry of Science and ICT), Korea (IITP-2019-2017-0-01015)
Article Title: Conformal doping strategy for fin structures: tailoring of dopant profile through multiple monolayer doping and capping layer control
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-01-21
Date Accepted: 2020-03-03
Online publication date: 2020-04-03