Sayed, Islam https://orcid.org/0000-0002-9311-3658
Liu, Wenjian https://orcid.org/0000-0003-0483-649X
Georgieva, Jana
Krishna, Athith
Keller, Stacia https://orcid.org/0000-0002-6529-3516
Mishra, Umesh K
Funding for this research was provided by:
Office of Naval Research
Article Title: Characterization of AlSiO dielectrics with varying silicon composition for N-polar GaN-based devices
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2020 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-05-15
Date Accepted: 2020-06-22
Online publication date: 2020-08-10