Ishiji, Kotaro https://orcid.org/0000-0003-4736-7347
Sato, Kiichi
Fujii, Takashi
Araki, Tsutomu
Mouri, Shinichiro
Sugie, Ryuichi
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-04-22
Date accepted: 2020-06-22
Online publication date: 2020-08-27