Ishiji, Kotaro https://orcid.org/0000-0003-4736-7347
Sato, Kiichi
Fujii, Takashi
Araki, Tsutomu
Mouri, Shinichiro
Sugie, Ryuichi
Article Title: Correlation between crystal warpage and swelling of 4H-SiC through implantation and annealing
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2020-04-22
Date Accepted: 2020-06-22
Online publication date: 2020-08-27