Arjmand, T https://orcid.org/0000-0002-7238-5769
Legallais, M https://orcid.org/0000-0002-7773-7479
Haffner, T
Bawedin, M
Ternon, C https://orcid.org/0000-0001-8890-4239
Journal title: Semiconductor Science and Technology
Article type: paper
Article title: Development of a robust fabrication process for single silicon nanowire-based omega gate transistors on polyamide substrate
Copyright information: © 2020 IOP Publishing Ltd
Publication dates
Date received: 2020-08-07
Date accepted: 2020-11-16
Online publication date: 2020-12-09