Liu, Wei-Sheng https://orcid.org/0000-0002-2109-3256
Hsu, Chih-Hao
Jiang, Yu
Lai, Yi-Chun
Kuo, Hsing-Chun
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 109-2221-E-155-050)
Article Title: Improvement of device characteristics of plasma-treated indium gallium zinc oxide thin-film transistors through thermal annealing
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2020-11-17
Date Accepted: 2021-02-16
Online publication date: 2021-02-26