Sinha, Arpan https://orcid.org/0000-0002-5459-5949
Gupta, Mool C https://orcid.org/0000-0002-1782-5354
Funding for this research was provided by:
NASA (Langley Professor program)
National Science Foundation (2005098)
Article Title: Microscale patterning of semiconductor c-Si by selective laser-heating induced KOH etching
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2021-03-07
Date Accepted: 2021-06-09
Online publication date: 2021-06-29