Li, Rui http://orcid.org/0000-0002-0508-7673
Huang, Mingmin
Zhang, Xi
Hu, Min
Yang, Zhimei
Ma, Yao
Gong, Min
Funding for this research was provided by:
Science and Technology Plan Project of Sichuan Province (2020YJ0005)
National Natural Science Foundation of China (61804101)
Article Title: Superjunction MOSFET with a trench contact on partly relatively lightly doped P-pillar for excellent reverse recovery
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2021 IOP Publishing Ltd
Publication dates
Date Received: 2021-06-17
Date Accepted: 2021-08-03
Online publication date: 2021-08-31