Ciou, Fong-Min
Chang, Yen-Cheng
Chen, Po-Hsun https://orcid.org/0000-0001-5223-793X
Lin, Chien-Yu
Lin, Yun-Hsuan
Chen, Kuan-Hsu
Jin, Fu-Yuan
Lin, Yu-Shan
Hung, Wei-Chun
Chang, Kai-Chun
Kuo, Ting-Tzu
Yeh, Chien-Hung
Chang, Ting-Chang https://orcid.org/0000-0002-5301-6693
Article Title: Investigation of degradation mechanism after negative bias temperature stress in Si/SiGe channel metal–oxide–semiconductor capacitors induced by hydrogen diffusion
Journal Title: Semiconductor Science and Technology
Article Type: paper
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Publication dates
Date Received: 2021-08-17
Date Accepted: 2021-11-26
Online publication date: 2021-12-10