Du, Feibo https://orcid.org/0000-0001-8622-2429
Xie, Tiantian https://orcid.org/0000-0003-2314-8545
Wang, Jun
Chang, Kuan-Chang
Lin, Xinnan
Hou, Fei
Chen, Ruibo
Han, Aoran
Liu, Zhiwei https://orcid.org/0000-0003-0805-5930
Funding for this research was provided by:
Nature Science Foundation of China (61974017)
Central Universities Fundamental Research Project (ZYGX2018J025)
Shenzhen Project (JSGG20180504170016884)
Article Title: All-HKMG-bounded SCR for advanced ESD protection in 14 nm FinFET technology
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-03-15
Date Accepted: 2022-06-09
Online publication date: 2022-06-16