Fang, Paiwen
Rao, Chang
Liao, Chao
Chen, Shujian
Wu, Zhisheng
Lu, Xing
Chen, Zimin
Wang, Gang
Liang, Jun
Pei, Yanli https://orcid.org/0000-0003-3456-0746
Funding for this research was provided by:
Natural Science Foundation of China (61804187)
Science and Technology Project of Guangdong Province (2019B010132002)
Shenzhen Science and Technology Innovation Committee (KQJSCX20180323174713505)
Article Title: Effects of microwave plasma treatment on β-Ga2O3 Schottky barrier diodes
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd. All rights, including for text and data mining, AI training, and similar technologies, are reserved.
Publication dates
Date Received: 2022-06-08
Date Accepted: 2022-09-21
Online publication date: 2022-10-05