Hieu, Le Trung https://orcid.org/0000-0002-3195-7142
Hsu, Heng-Tung
Chiang, Chung-Han
Panda, Debashis
Lee, Ching-Ting https://orcid.org/0000-0001-8265-200X
Lin, Chun-Hsiung
Chang, Edward Yi
Funding for this research was provided by:
Ministry of Education
Center for the Semiconductor Technology Research
Higher Education Sprout Project
Chung-Shan Institute of Science and Technology (NCSIST-404-V407(111))
The Featured Areas Research Center Program
Ministry of Science and Technology, Taiwan (NSTC 111-2634-F-A49-008)
Article Title: Effects of AlN/GaN superlattice buffer layer on performances of AlGaN/GaN HEMT grown on silicon for sub-6 GHz applications
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2022 IOP Publishing Ltd
Publication dates
Date Received: 2022-09-12
Date Accepted: 2022-12-16
Online publication date: 2022-12-29