von Borany, J http://orcid.org/0000-0001-9449-9356
Engelmann, H-J
Heinig, K-H http://orcid.org/0000-0002-0457-1164
Amat, E http://orcid.org/0000-0001-9214-0331
Hlawacek, G http://orcid.org/0000-0001-7192-716X
Klüpfel, F http://orcid.org/0000-0003-0515-022X
Hübner, R http://orcid.org/0000-0002-5200-6928
Möller, W http://orcid.org/0000-0002-9068-8384
Pourteau, M-L
Rademaker, G http://orcid.org/0000-0002-9113-4113
Rommel, M http://orcid.org/0000-0002-1141-3228
Baier, L
Pichler, P http://orcid.org/0000-0002-8155-8895
Perez-Murano, F http://orcid.org/0000-0002-4647-8558
Tiron, R http://orcid.org/0000-0002-4772-3295
Funding for this research was provided by:
Horizon 2020 Framework Programme (688072)
Article Title: CMOS-compatible manufacturability of sub-15 nm Si/SiO2/Si nanopillars containing single Si nanodots for single electron transistor applications
Journal Title: Semiconductor Science and Technology
Article Type: paper
Copyright Information: © 2023 The Author(s). Published by IOP Publishing Ltd
Publication dates
Date Received: 2022-06-28
Date Accepted: 2023-02-23
Online publication date: 2023-03-28